Your location/Product/Pvd Coating System
 
 

   With abundance of experience in equipment manufacturing and coating process, StarArc is able to provide PVD (Physical Vapor Deposition), IAPVD (Ion Beam Assisted PVD) coating system and associated high end vacuum equipment.
Series
Parameter
Jupiter series PVD Coating Equipment
Diaman tseries PVD /IAPVD Coating Equipment
Seeyu series PVD Coating Equipment
Effective Chamber Dimension
ø1500x1100mm
ø1300x1100mm
ø1200x900mm
Pumping System
 Rotary + Roots + Diffusion
 Rotary + Roots + Diffusion
Rotary + Roots +Turbo
Target
5 sets：2 Magnetron+ 2 Magnetic Enhanced Cathodic Arc+1 Ion Beam
6 sets：2 Magnetron+ 4 IAPVD Source
6 sets：1 Magnetron+ 3 Magnetic Enhanced Cathodic Arc+ 1 Ion Beam
Substrate Holder (Planet structure)
10~12 planets that revolves on its own axis.
12 planets that revolves on its own axis.
12 planets that revolves on its own axis.
Control System
PLC: process control
PC: interface
PLC: process control
PC: interface
PLC: process control
PC: interface
Coatings
TiN，TiAlN， CrN， AlSiN， TiAlCrN etc
DLC，aC-H，CrN etc
taC, TiN, CrN, DLC-Al etc
Applications
tools, wear resistant components.
Wear-resistant & self-lubricate components, superior quality moulds, special slicing tools
Wear-resistant & self-lubricate components, superior quality moulds, special slicing tools

 
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